Single-Chip 100-Pixel 2.8 THz CMOS Camera: Antenna and Front-End Detector Design

Abstract

While most parts of the electromagnetic spectrum are utilized by existing consumer and commercial technologies, there is a lack of technology that operates in the terahertz region (0.3–3 THz). Terahertz waves are non-ionizing (unlike x-rays), have better spatial resolu- tion than microwaves, and can penetrate optically opaque materials. These qualities make the terahertz region particularly attractive to applications in biomedical imaging, security screening, communications, spectroscopy, and nondestructive evaluation. However, the few existing terahertz technologies are large, bulky, and expensive devices. Recent research in the terahertz community has focused on the miniaturization of terahertz technology, work- ing towards developing on-chip terahertz generators and detectors in silicon processes. This thesis pushes the boundaries of current terahertz research by designing and fabricating a silicon CMOS-based 100-pixel terahertz camera for real time detection of 2.8 THz radiation. To our knowledge, never before has such a system, that is capable of video rate imaging, been designed in standard silicon processes to operate at frequencies above 1 THz. This thesis focuses on the design of the camera’s antenna and terahertz detector, and discusses the layout of the full camera chip. The chip has recently been sent for fabrication and is expected to be ready for testing mid-July 2018.