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Please use this identifier to cite or link to this item: http://arks.princeton.edu/ark:/88435/dsp01ks65hf267
Title: Step Coverage: Deposition and Modelling
Authors: Chen, Jerry C.
Advisors: Wagner, John
Department: Electrical Engineering
Class Year: 1989
Extent: 63 Pages
Other Identifiers: 3351
URI: http://arks.princeton.edu/ark:/88435/dsp01ks65hf267
Location : This thesis can be viewed in person at the Mudd Manuscript Library. To order a copy complete the Senior Thesis Request Form. For more information contact mudd@princeton.edu.
Type of Material: Princeton University Senior Theses
Appears in Collections:Electrical Engineering, 1932-2020

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