Please use this identifier to cite or link to this item:
http://arks.princeton.edu/ark:/88435/dsp01j6731581p
Title: | NanoImprint Lithography of Dielectric Structures via Sacrificial Polymers |
Authors: | Chang, Daniel H. |
Advisors: | Chou, Stephen |
Department: | Electrical Engineering |
Class Year: | 2008 |
Extent: | 18 Pages |
Other Identifiers: | 22259 |
URI: | http://arks.princeton.edu/ark:/88435/dsp01j6731581p |
Location : | This thesis can be viewed in person at the Mudd Manuscript Library. To order a copy complete the Senior Thesis Request Form. For more information contact mudd@princeton.edu. |
Type of Material: | Princeton University Senior Theses |
Appears in Collections: | Electrical Engineering, 1932-2020 |
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