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http://arks.princeton.edu/ark:/88435/dsp012227mr70t
Title: | SESA Rt-CVD Si/Si1-xGex/Si HBT Selective Epitaxy & Self-Alignment Rapid Thermal Chemical Vapor Deposition Si/Si1-xGex/Si Heterojunction Bipolar Transistor |
Authors: | Rim, Kern |
Advisors: | Sturm, James C. |
Department: | Electrical Engineering |
Class Year: | 1993 |
Extent: | 69 Pages |
Other Identifiers: | 5726 |
URI: | http://arks.princeton.edu/ark:/88435/dsp012227mr70t |
Location : | This thesis can be viewed in person at the Mudd Manuscript Library. To order a copy complete the Senior Thesis Request Form. For more information contact mudd@princeton.edu. |
Type of Material: | Princeton University Senior Theses |
Appears in Collections: | Electrical Engineering, 1932-2020 |
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